Tom Oomen


Research of Tom Oomen

For an overview of our research challenges and results see

Our lab hosts state-of-the-art equipment. An incomplete lists includes the following, see also my publications for detailed descriptions.

  • Floating Reticle (FFR) setup: overactuated and oversensed nanometer-accurate reticle stage for lithography

  • Overactuated Test Rig (OAT): overactuated and oversensed nanometer-accurate wafer stage for lithography

  • Piezo stepper: electron microscopy